Inline gas filters, Wafergard® II F Mini XL
: ENTEGRIS
Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Use them in gas panels and gas cabinets where ultrapure gas is required for wafer processing.
- Superior particulate filtration for ultrapure gas system filtration
- Low pressure drop reduces the risk of condensation in low vapour pressure gases
- Cleanroom manufactured, welded and tested
- PTFE membranes provide high efficiency filtration
Filter element: hydrophobic PTFE membrane supported by moulded PTFE PFA structure; housing: electropolished 316L stainless steel.
Applications: ozone applications (gas), gas cabinets, ultrapure gas systems, gas panels, valve manifold boxes.
Downstream cleanliness particles: Less than 0,03 particles/liter (<1 particle/0,028 m³) greater than 0,01 μm.
Downstream cleanliness volatiles: <10 ppb moisture.
- Catalog No:
- ENTEWG2F32PS1
- ENTEWG2F02RR2
- ENTEWG2F02RR4
- ENTEWG2F02PS1
- ENTEWG2F02JJ4
- Material:
- PTFE
- PTFE
- PTFE
- PTFE
- PTFE
- Max. differential pressure:
- Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C - Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C - Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C - Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C - Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C
- Max. operating pressure:
- 207 bar @ 23 °C
- 207 bar @ 23 °C
- 207 bar @ 23 °C
- 207 bar @ 23 °C
- 207 bar @ 23 °C
- Leak rating:
- Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec - Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec - Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec - Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec - Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec
- Max. operating temperature:
- 120 °C
- 120 °C
- 120 °C
- 120 °C
- 120 °C
- Fitting size:
- 3/8" compression seal
- 1/4" gasket seal
- 1/2" gasket seal
- 1/4" compression seal
- 1/2" butt weld tube
- Inlet/outlet:
- Male/male
- Male/male
- Male/male
- Male/male
- -
- Ø×L:
- 25×119 mm
- 28×127 mm
- 28×133 mm
- 25×115 mm
- 28×133 mm
- SeqPk
- Inline gas filter, Wafergard® II F Mini XL
Specifications
MaterialPTFEEnvironmentally PreferableMax. differential pressureForward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °CMax. operating pressure207 bar @ 23 °CLeak ratingQualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/secMax. operating temperature120 °CFitting size1/4" gasket sealInlet/outletMale/maleØ×L28×127 mm - Inline gas filter, Wafergard® II F Mini XL
Specifications
MaterialPTFEEnvironmentally PreferableMax. differential pressureForward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °CMax. operating pressure207 bar @ 23 °CLeak ratingQualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/secMax. operating temperature120 °CFitting size1/2" gasket sealInlet/outletMale/maleØ×L28×133 mm - Inline gas filter, Wafergard® II F Mini XL
Specifications
MaterialPTFEEnvironmentally PreferableMax. differential pressureForward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °CMax. operating pressure207 bar @ 23 °CLeak ratingQualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/secMax. operating temperature120 °CFitting size1/2" butt weld tubeInlet/outlet-Ø×L28×133 mm - Inline gas filter, Wafergard® II F Mini XL
Specifications
MaterialPTFEEnvironmentally PreferableMax. differential pressureForward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °CMax. operating pressure207 bar @ 23 °CLeak ratingQualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/secMax. operating temperature120 °CFitting size1/4" compression sealInlet/outletMale/maleØ×L25×115 mm - Inline gas filter, Wafergard® II F Mini XL
Specifications
MaterialPTFEEnvironmentally PreferableMax. differential pressureForward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °CMax. operating pressure207 bar @ 23 °CLeak ratingQualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/secMax. operating temperature120 °CFitting size3/8" compression sealInlet/outletMale/maleØ×L25×119 mm