Purification

Gas Purification
Inorganic regenerable media to purify gas at ambient temperatures to part-per-trillion levels Entegris' innovative gas microcontamination control products and technologies help ensure our customers are equipped with the latest technologies and are prepared for the challenges of tomorrow's advanced devices, photovoltaics, life sciences and lithium ion batteries.

Liquid Purification
Removal of metal ion contaminants Entegris' liquid purification technologies deliver the ultimate protection from metal ion contamination by providing high capacity, single pass removal of metal ions from ultrapure water and some organic solvents. Ideal for critical cleaning applications including DI water rinse on recirculation and single pass process tools, wafer dry and post CMP cleans.

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